LEELIS-III workshop on Low-energy electrons: Lithography, Imaging, and Soft Matter
LEELIS-III is a unique platform that focusses on the role of low-energy electrons in imaging and nanolithography.
At this workshop we address the interactions between low-energy electrons and soft matter from different perspectives. We bring together experts from complementary fields such as condensed matter physics, EUVL, low-energy electron microscopy and engineering to come to novel insights on the physics of low-energy electrons, and the chemistry they induce.