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14 december 2018

Closed Industrial Partnership Programme 

Number i20.
Title Contact line control during wetting and dewetting (CLC)  
Executive organisational unit BUW
Programme management Prof.dr. D. Lohse
Duration 2009-2014
Cost estimate M€ 1.8
Partner(s) ASML, Océ

The objective of the proposed programme is to study fundamental and as yet not understood aspects of contact line dynamics in complex, technologically relevant flow geometries and substrates. Especially, understanding and predicting of instabilities leading to highly non-linear problems in thin layers at the interface between liquid/gas/solid phase are the focus points of this study. This will be done with special attention to applications in leading edge technologies in advanced high-tech industrial problems. More explicitly, the aims are (i) to understand and then control the ink wetting on an inkjet printer nozzle plate around the nozzle and its interaction with droplet formation and (ii) significantly improve the perfor­mance of the immersion functionality in optical lithography tools with respect to throughput, overlay and avoidance of defects. 

Background, relevance and implementation
Contact lines are of great importance for industrial applications: whenever a liquid is deposited onto a solid surface, the dynamics of the liquid is entirely governed by the contact line defining the front between 'wet' and 'dry' regions. Inkjet printing and immersion litho­graphy technology are prime examples. This programme will bring together these techno­logies through industrial partners ASML and Océ with the emerging field of wetting/surface phenomena/nanofluidics. This programme is multidisciplinary, involving experimental, theoretical, and numerical physicists, and engineers.

The programme consists of six subprojects in four different research groups spread over the three technical universities. To achieve the goals mentioned in the objectives, both visuali­zation, numerical and theoretical modelling, and flow manipulation will be used. There is close mutual interaction and exchange of ideas and results between all these subprojects. Besides, each PhD student will spend a six months implementation period with the industrial partners.

The programme is managed by a programme leader, Prof.dr. Detlef Lohse.
The programme leader is responsible for the following tasks:
1.   Preserving the coherence of the programme in accordance with the programme proposal.
2.   Steering and monitoring of the programme and the research projects within the programme.
3.   Steering and monitoring of knowledge transfer between the participating research groups in academia and industrial partners including screening for intellectual property rights (IP); i.e., the User Committee will assess options for patenting the results.

The industrial partners ASML and Océ are represented in a User Committee. This committee will evaluate the quality and innovative character of the projects as well as the relevance of the results for ASML and Océ. The progress of the programme will be reported in semi-annual reports and presented during semi-annual progress meetings. In addition, there will be two informal workshops per year.

The final evaluation of this programme consisted a self-evaluation report initiated by the programme leader, which was presented to the executive board in 2015.

Please find a research highlight that was achieved in 2014 within this FOM programme here.