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11 december 2018

Approved Industrial Partnership Programme


Number i34
Title Fundamental fluid dynamics challenges of extreme ultraviolet lithography (FEUL)
Executive organisational unit BUW
Programme management Prof.dr. D. Lohse
Duration 2013-2018
Cost estimate M€ 1.7
Partner(s) ASML

Extreme Ultraviolet Lithography (EUVL) is considered to be the future technology for the production of Integrated Circuits, yet there are major fundamental and technological challenges to overcome. The objective of the project is:
- To achieve a better control of the debris formation to reduce contamination of the optical elements in the EUV machine, especially the source optics.
- To maximize the conversion efficiency from laser power to EUV by properly shaping the tin droplet.

Background, relevance and implementation
Major technological challenges at ASML have their origin in fundamental fluid dynamical problems. This in particular holds for some crucial phenomena in EUV sources for the next generation of lithography machines, on which the future of ASML depends.

The chosen strategy to cope with this problem is to set up a fundamental fluid dynamics group (one group leader and three PhD students) for ASML that will be located within the laboratories of ASML in Veldhoven, with a long-term perspective and a close link to Physics of Fluids groups at the universities within the Netherlands and abroad. This group should be problem-oriented and able to transfer the knowledge from the university groups to ASML and vice-versa make the university groups aware of the fundamental fluid dynamical challenges at ASML. 

The focus of this IPP is on understanding and solving the fundamental fluid dynamical issues inside the EUV source by performing controlled experiments, high-speed visualization, numerical simulations, and theoretical modelling. These challenges directly touch upon contemporary research in fluid physics, pushing the boundaries into a barely explored range of parameters.

For the programme a scientific advisory committee is established that meets yearly, and monitors progress of the programme. A supervisory board oversees overall progress of the programme. Drastic changes require approval of the supervisory board.

The final evaluation of this programme will consist of a self-evaluation initiated by the programme leader and is foreseen in 2018.